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CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)

D. Lange, O. Brand, H. Baltes




[PDF.aw58] CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)

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 |  2010-12-03 |  2013-10-04 | Original language:English | PDF # 1 |  9.25 x.36 x6.10l,.49 | File type: PDF | 142 pages

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This book is intended for scientists and engineers in the field of micro- and nano­ electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two techno...

You can specify the type of files you want, for your device.CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)   |  D. Lange, O. Brand, H. Baltes. I have read it a couple of times and even shared with my family members. Really good. Couldnt put it down.

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