[PDF.04vv] Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE Tutorial Text Vol. TT12) (Tutorial Texts in Optical Engineering)
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Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE Tutorial Text Vol. TT12) (Tutorial Texts in Optical Engineering)
Ludwig Reimer
[PDF.rx04] Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE Tutorial Text Vol. TT12) (Tutorial Texts in Optical Engineering)
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| #3054205 in Books | SPIE Press | 1993-02-01 | Original language:English | PDF # 1 | 10.00 x7.00 x.50l,.65 | File type: PDF | 117 pages | |
While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependenc...
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