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Materials Reliability in Microelectronics IX: Volume 563 (MRS Proceedings)

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[PDF.gv30] Materials Reliability in Microelectronics IX: Volume 563 (MRS Proceedings)

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 | #14969068 in Books |  1999-10-01 | Original language:English | PDF # 1 |  9.20 x1.00 x6.20l,1.41 | File type: PDF | 311 pages

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The continual evolution of integrated circuit architecture places ever-increasing demands on the metal and dielectric thin films used in fabricating these circuits. Not only must these materials meet performance and manufacturability requirements, they must also be highly reliable for many years under operating conditions. A thorough understanding of the failure mechanisms and the effect of processing conditions and material properties on reliability is required to achie...

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