[PDF.82gz] Mechanical Microsensors (Microtechnology and MEMS)

Mechanical Microsensors (Microtechnology and MEMS)

[PDF.au82] Mechanical Microsensors (Microtechnology and MEMS)

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 | #4495464 in Books |  Springer |  2001-01-12 | Original language:English | PDF # 1 |  9.21 x.75 x6.14l,1.34 | File type: PDF | 295 pages

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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit­ zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me­ chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Secon...

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