[PDF.83cz] Microscopy of Semiconducting Materials: 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK (Institute of Physics Conference Series)

Microscopy of Semiconducting Materials: 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK (Institute of Physics Conference Series)

[PDF.ch00] Microscopy of Semiconducting Materials: 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK (Institute of Physics Conference Series)

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 | #16879785 in Books |  CRC Press |  2000-01-01 | Original language:English | PDF # 1 |  9.21 x1.63 x6.14l,3.11 | File type: PDF | 774 pages

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With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers specimen preparation using focused ion beam milling and advances in microscopy te...

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