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Near Field Emission Scanning Electron Microscopy (Applied Electron Microskopy - Angewandte Elektronenmikroskop)

Taryl L Kirk




[PDF.ep88] Near Field Emission Scanning Electron Microscopy (Applied Electron Microskopy - Angewandte Elektronenmikroskop)

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 | #10227899 in Books |  2010-08-15 | Original language:English | File type: PDF | 97 pages

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Low beam energies have been implemented in a simplified SEM technique; where the electron source, remote in standard SEMs, is brought within tens of nanometers to the object. This method, known as the "near field emission scanning electron microscopy" (NFESEM), is capable of imaging conducting surfaces with nanometer resolution using beam energies less than 60 eV. The terminology "near" refers to the locality of the field-emitted electron source; which is to distinguish ...

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