[PDF.20rg] Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing)
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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing)
Wei Gao
[PDF.pd86] Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing)
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| #5627661 in Books | 2010-06-30 | Original language:English | PDF # 1 | 9.21 x.88 x6.14l,1.40 | File type: PDF | 354 pages||0 of 0 people found the following review helpful.| My friend loved this book. This is what he commented:|By YS|How to measure circularity (roundness) and cylindricity of a work piece in nanoscale without the run-out errors of the spindle and the out-of-straightness errors of liner guides ? How to measure and construct the nanoedges within 100nm scale and the 3D profile of a single point diamond cutting tool used to fabricate t
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are f...
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