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Quantitative Data Processing in Scanning Probe Microscopy: SPM Applications for Nanometrology (Micro and Nano Technologies)

Petr Klapetek




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 | #5643431 in Books |  William Andrew |  2012-12-11 | Original language:English | PDF # 1 |  9.25 x.75 x7.52l,1.55 | File type: PDF | 336 pages

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Accurate measurement at the nano-scale – nanometrology – is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture of a specimen by scanning with a physical probe; unrestrained by the wavelength of light or electrons, the resolution obtainable with this technique can resolve...

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