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Semiconductor Device and Failure Analysis : Using Photon Emission Microscopy

Wai Kin Chim




[PDF.db27] Semiconductor Device and Failure Analysis : Using Photon Emission Microscopy

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 | #4995786 in Books |  2000-12-13 | Original language:English | PDF # 1 |  9.31 x.78 x6.28l,1.69 | File type: PDF | 288 pages

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The diminishing size and greater complexity of modern semiconductor integrated circuits poses new challenges in fault detection. Photon Emission Microscopy (PEM) is a physical fault localisation technique used for analysing IC failures. Detailing the PEM technique and its application to semiconductor device analysis, this unique reference:
* Illustrates the application of the PEM technique in various areas of device reliability, in particular hot-carrier, oxide and...

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