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Spectroscopic Ellipsometry and Reflectometry: A User's Guide

Harland G. Tompkins, William A. McGahan




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 | #3065702 in Books |  Harland G Tompkins |  1999-03-18 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  9.45 x.78 x6.28l,1.11 | File type: PDF | 248 pages

 | Spectroscopic Ellipsometry and Reflectometry A User s Guide

||1 of 1 people found the following review helpful.| Book on SE|By Ester van Gerwen|A good follow up on Tompkins "A user's guide to Ellipsometry". This book deals with Spectroscopic Ellipsometry, but also covers the basics of single-wavelength ellipsometry. The book covers analysis of Thermal Oxide, PECVD SiO, SiO2, SiN, a-Si, etc. It also covers the mathematics behind the Lorentz oscillator, used in SE layer modelling.|2 of 4 p

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering...

You easily download any file type for your gadget.Spectroscopic Ellipsometry and Reflectometry: A User's Guide   |  Harland G. Tompkins, William A. McGahan. I was recommended this book by a dear friend of mine.

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