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Cantilever-Based CMOS Sensor Systems

D. Lange, O. Brand, H. Baltes




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 | #10858211 in Books |  2002-09-17 | Original language:English | PDF # 1 |  9.21 x.44 x6.14l,.75 | File type: PDF | 142 pages

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This book is intended for scientists and engineers in the field of micro- and nano­ electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two techno...

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